Application of focused ion beam for machining of nanopillar sheet

Ali, Mohammad Yeakub (2011) Application of focused ion beam for machining of nanopillar sheet. Research Report. s.n. (Unpublished)

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Abstract

This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angle (θ), aspect ratio (ar) and average surface roughness (Ra). Statistical models of output responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum θ, Ra and maximum ar. The optimized values were obtained and verified experimentally. The optimized values of θ, ar were 7.5° and 1.7 respectively which were obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 5 μm. Besides, the optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6μm. By using these process parameters, microfeatures for Bio-MEMS were fabricated

Item Type:	Monograph (Research Report)
Additional Information:	4751/28921
Uncontrolled Keywords:	focused ion beam (FIB, micromachining, Bio-MEMS microfluidic devices
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	21 Jan 2014 10:20
Last Modified:	21 Jan 2014 10:31
URI:	http://irep.iium.edu.my/id/eprint/28921

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