Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application

Sabur, Abdus and A., Moudood and Ali, Mohammad Yeakub and Maleque, Md. Abdul (2013) Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application. IOP Conference Series: Materials Science and Engineering, 53 (2013). pp. 1-5. ISSN 1757-8981

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Abstract

Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for creation of continuous conductive pyrolytic carbon layer on the machined surface. Experiments are conducted by varying the voltage (V), capacitance (C) and rotational speed (N). Correlating these variables a mathematical model for surface roughness (SR) is developed using Taguchi method. The results showed that the V and C are the significant parameters of SR in micro-EDM for nonconductive ZrO2 ceramic. The model also showed that SR increases with the increase of V and C.

Item Type:	Article (Journal)
Additional Information:	4751/40692
Uncontrolled Keywords:	Blind holes; Conductive layer; Machined surface; Machining Process; MEMS applications; Non-contact; Pyrolytic carbon; Rotational speed
Subjects:	T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	26 Jan 2015 16:22
Last Modified:	24 May 2018 14:49
URI:	http://irep.iium.edu.my/id/eprint/40692

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