Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage

Abdalla, Mostafa M. and Reddy, Chevva Konda and Faris, Waleed Fekry and Gürdal, Zafer (2005) Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage. In: 44th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference 2003, 7th-10th April 2003, Norfolk, Virginia.

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Abstract

We consider optimizing the shape of a capacitive micro-beam for maximum pull-in voltage. The problem is discretized using finite elements. The normal flow algorithm is used to trace the nonlinear voltage displacement curve and find the pull-in point. Optimal width and thickness distributions are obtained for different beam boundary conditions using a resizing scheme based on optimality criterion. The results indicate that substantial increase in pull-in voltage can be achieved by varying the width and/or thickness distribution.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Additional Information:	4694/49869 (eISBN: 978-1-62410-100-7, DOI: 10.2514/MSDM03)
Uncontrolled Keywords:	Micro-electro-mechanical devices (MEMS)
Subjects:	T Technology > T Technology (General) T Technology > T Technology (General) > T351 Mechanical drawing. Engineering graphics T Technology > TJ Mechanical engineering and machinery T Technology > TJ Mechanical engineering and machinery > TJ181 Mechanical movements T Technology > TJ Mechanical engineering and machinery > TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General)
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering
Depositing User:	Prof.Dr. Waleed Fekry Faris
Date Deposited:	10 Apr 2016 10:25
Last Modified:	09 May 2016 09:01
URI:	http://irep.iium.edu.my/id/eprint/49869

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