Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates

Nur Sa’adah, Muhamad Sauki and Herman, Sukreen Hana and Ani, Mohd Hanafi and Mohamad Rusop , Mahmood (2013) Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates. Advanced Materials Research, 795. pp. 403-406. ISSN 1022-6680

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Abstract

Zinc oxide (ZnO) thin films were deposited on teflon substrates by RF magnetron sputtering at different substrate temperature. The effect of substrate temperature on ZnO thin films electrical and structural properties were examined using current-voltage (I-V) measurement, and xray diffraction (XRD) It was found that the electrical conductivity and resistivity of the ZnO thin film deposited at 40oC was the highest and lowest intensity accordingly. This was supported by the crystalline quality of the films from the x-ray diffraction (XRD) results. The XRD pattern showed that the ZnO thin film deposited at 40oC has the highest intensity with the narrowest full-width-athalf- maximum indicating that the film has the highest quality compared to other thin film.

Item Type:	Article (Journal)
Additional Information:	4583/37597
Uncontrolled Keywords:	ZnO thin films, substrate temperatures, flexible substrate, RF magnetron sputtering
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) T Technology > TA Engineering (General). Civil engineering (General) > TA401 Materials of engineering and construction
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Dr Mohd Hanafi Ani
Date Deposited:	07 Aug 2014 10:26
Last Modified:	22 Dec 2016 15:13
URI:	http://irep.iium.edu.my/id/eprint/37597

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