Minimum chip thickness in machining MEMS structure using Tool Based Micromilling

Ali, Mohammad Yeakub and Mass Duki, Siti Hamizah and Mansor, Noor Adila (2011) Minimum chip thickness in machining MEMS structure using Tool Based Micromilling. In: IIUM Research, Invention and Innovation Exhibition (IRIIE) 2011, 9-10 February 2011, Cultural Activity Centre (CAC) and KAED Gallery IIUM.

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Abstract

Tool based micromilling is a promising micromanufacturing technology to produce miniaturized features of about 25μm in size frMEMS and Bio-MEMS applications.It is the most flexible and the fastest way to produce complex three dimensional microcomponents including sharp edges with surface finish at a reasonble cost.Moreover,it is capable of machining a broader range of materials such as engineering plastics, aluminium, titanium, etc. However,the issue in tool based micromilling is the minimum chip thickness which is often between5-30% of the tool edge radius. No chip will form if the depth of cut cannot achieve the minimum chip thickness value.The lack of control on minimum chip thickness often leads to the coarse machined surface, poor machining accuracy and difficult in chip removal from the machining zone which leads to burrformation.Hence, the chip formation mechanism should be studied deeply to avoid these problems.In this research WC was elected for tool material and Aluminium Alloy 1100 for work material for the investigation of minimum chip thickness.The experiment is being conducted on a miniature machine known as Microtools Integrated Multi-purpose machine modelled DT-110.The value of chip thickness produced by tool 4.8μmwith3mm/min feedrate,3000rpm cutting speed and 5μm depth of cut.The minimum chip thickness is useful for machining Micro electromechanical System(MEMS) and Bio-MEMSstructures.

Item Type:	Conference or Workshop Item (Poster)
Additional Information:	4751/2558
Uncontrolled Keywords:	Tool based micromilling, MEMS, Bio-MEMS, Chip formation
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	14 Sep 2011 11:56
Last Modified:	20 Dec 2011 15:31
URI:	http://irep.iium.edu.my/id/eprint/2558

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