Fabrication of Bio-MEMS Nanostructure by focused ion beam

Ali, Mohammad Yeakub and Mohd Fuad, Nurul Hajar (2010) Fabrication of Bio-MEMS Nanostructure by focused ion beam. In: International Conference on the Advancement of Materials and Nanotechnology, 29 Nov-1 Dec 2010, Prince Hotel, Kuala Lumpur.

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Abstract

This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum Ra. The optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6 μm. By using these process parameters, microfeatures such as microholes, micro/nano pillars and etc. were fabricated.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4751/2433
Uncontrolled Keywords:	Focused Ion Beam, Bio-MEMS, Nanostructure
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	13 Sep 2011 16:48
Last Modified:	06 Dec 2011 14:04
URI:	http://irep.iium.edu.my/id/eprint/2433

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