Design and modeling of silicon MEMS accelerometer

Hrairi, Meftah and Baharom, Badrul Hanafi (2011) Design and modeling of silicon MEMS accelerometer. In: International Conference on Mechanical, Automotive and Aerospace Engineering, ICMAAE’11, 17 - 19 May, 2011, Kuala Lumpur.

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Abstract

In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modeling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4980/2052 (ISBN: 9781612844374)
Uncontrolled Keywords:	MEMS, FEA, accelerometer, design, modeling
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering Kulliyyah of Engineering > Department of Mechanical Engineering
Depositing User:	Prof. Dr. Meftah Hrairi
Date Deposited:	20 Sep 2011 09:58
Last Modified:	29 Feb 2012 11:12
URI:	http://irep.iium.edu.my/id/eprint/2052

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