Synthesis and characterization of Ta/TaN coatings with CFUBMS-HiPIMS technology

Polat, Muhammed Alperen and Gülten, Gökhan and Totik, Ya¸sar and Maleque, Md. Abdul and Haji Hassan, Masjuki and Yusuf Çetin, Safa and Efeoglu, Ihsan (2023) Synthesis and characterization of Ta/TaN coatings with CFUBMS-HiPIMS technology. In: Proceeding of 5th International Conference on Advances in Manufacturing and Materials Engineering, ICAMME 2022, 9—10 August, Kuala Lumpur, Malaysia, 9—10 August, 2022, Kuala Lumpur, Malaysia.

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Abstract

The aim of this work is to study the mechanical and tribological behavior of Ta/TaN coated 52,100 tool steel. Ta/TaN thin film have been deposited by CFUBMS-HiPIMS method. In the early 2000s, it started to show itself in R&D studies with the technological developments in electronic power designs for HiPIMS technology. Today, HiPIMS has been integrated and successfully used as a hybrid in magnetic field sputtering systems for R&D purposes and industrial scale. HiPIMS technology provides a stable and uniform discharge plasma formation with high current density, ensuring that the growth of the high-density coating and the adhesion bond at the interface is strong. The development of graded Ta/TaN coating structures to optimize adhesion and wear behavior are crucial in high adhesion and lower wear levels when depositing very hard brittle coatings. Ta/TaN films have excellent fric�tion and wear properties. For this reason, it is predicted that it will be effective in increasing efficiency and performance for many industrial applications, especially in biodiesel injectors. Studies on the mechanical and tribological characteristics of the TaN system in comparison to other transition metals, however, are few since it has a hard protective layer. This work looked into the mechanical and tribological characteristics of thin Ta/TaN thin films. The maximum hardness (28.069 GPa) was obtained for the film deposited at 9 sccm N2 amount. The highest critical load value is achieved as 45 N. The lowest coefficient of friction value (0.419) obtained was found in the R1 film, where the lowest deposition pressure (0.27) was applied.

Item Type:	Conference or Workshop Item (Other)
Subjects:	T Technology > T Technology (General) > T173.2 Technological change T Technology > TN Mining engineering. Metallurgy > TN600 Metallurgy T Technology > TP Chemical technology > TP200 Manufacture and use of chemicals T Technology > TS Manufactures > TS200 Metal manufactures. Metalworking
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering Kulliyyah of Engineering > Department of Mechanical Engineering
Depositing User:	Prof Dr. Md Abdul Maleque
Date Deposited:	29 May 2023 12:34
Last Modified:	29 May 2023 12:34
URI:	http://irep.iium.edu.my/id/eprint/104764

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