Heat-assisted μ-electrical discharge machining of silicon

Daud, Noor Dzulaikha and Ghazali, Farah Afiqa Mohd and Hamid, Fatimah Khairiah Abd and Nafea, Marwan and Saleh, Tanveer and Leow, Pei Ling and Ali, Mohamed Sultan Mohamed (2021) Heat-assisted μ-electrical discharge machining of silicon. International Journal of Advanced manufacturing Technology. pp. 1-12. ISSN 0268-3768 E-ISSN 1433-3015 (In Press)

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Abstract

Micro-electrical discharge machining (μEDM) is an unconventional machining method that is suitable for machining of conductive materials including highly doped silicon (Si) wafers. This paper reports a novel method of heat-assisted μEDM machining of Si wafers by varying the temperature to increase the electrical conductivity of Si. In order to achieve this condition, a ceramic heater is used to heat the Si wafers within the temperature range of 30–250 °C. In this study, themachining performances in terms of the material removal rate, tool wear rate, surface quality, and materials characterization have been investigated accordingly. The machining performance of p-type (1–10 Ω cm) Si wafers was investigated to machine a cavity based on different temperatures with a constant discharge energy of 50 μJ and a feed rate of 50 μm/min. The results indicated that increasing the machining temperature allowed achieving a higher material removal rate, lower tool wear rate, and lower surface roughness. The highest material removal rate of 1.43 × 10−5 mm3/s and a surface roughness of 1.487 μm were achieved at 250 °C. In addition, the material removal rate increased by a factor of ~16 times compared to the results obtained at the lowest temperature, 30 °C, and the Raman spectroscopy analysis revealed that no significant changes occurred in the Si structure before and after machining.

Item Type:	Article (Journal)
Additional Information:	6808/88380
Uncontrolled Keywords:	s Microelectrical discharge machining . Si micromachining . 3D machining . Machining performance
Subjects:	T Technology > T Technology (General)
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering Kulliyyah of Engineering > Department of Mechatronics Engineering
Depositing User:	Dr. Tanveer Saleh CEng MIMechE
Date Deposited:	24 Feb 2021 11:57
Last Modified:	24 Feb 2021 11:57
URI:	http://irep.iium.edu.my/id/eprint/88380

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