A novel design of low-voltage low-loss K-band RF-MEMS capacitive switch

Ma, Li-Ya and Soin, Norhayati and Nordin, Anis Nurashikin (2018) A novel design of low-voltage low-loss K-band RF-MEMS capacitive switch. In: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), 30th May-2nd June 2016, Budapest, Hungary.

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Abstract

This paper presents a novel design and analysis of capacitive radio frequency (RF) micro-electromechanical system (MEMS) switch. The RF-MEMS switch is actuated by electrostatic force with low-actuation voltage of 2.9V while it can be operated in a robust condition with maximum von Mises stress of 13.208 MPa which is less than aluminum’s yield stress. By finite-element-modeling (FEM) simulations, at switch-on state, insertion loss and reflection loss of the proposed RF-MEMS switch is obtained as -0.8023dB and -7.983dB, respectively; and at switch-off state, isolation and return loss is -22.45dB and - 0.8666dB, respectively. In order to improve the switch-on reflection loss to meet design specifications, two short high- impedance sections of transmission line have been calculated and added to the RF-MEMS switch. Then the reflection coefficient at switch-on state has been increased by 78.13% to -14.22dB which is less than -10dB while the insertion loss, isolation and return loss are all improved by 66.54%, 13.36% and 11.65%, respectively, with 65ohm high-impedance lines. The RF-MEMS switch’s actuation time of 27μs is obtained. A detail comparison among the proposed RF-MEMS switch and other state-of-the-art designs has been summarized in the end.

Item Type:	Conference or Workshop Item (Plenary Papers)
Additional Information:	3239/52022
Uncontrolled Keywords:	RF-MEMS switch; Low-Voltage; LowLoss; K-Band
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	23 Sep 2016 16:47
Last Modified:	18 Jul 2019 14:46
URI:	http://irep.iium.edu.my/id/eprint/52022

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