Design and simulation of 10 MHz MEMS oscillator

Taufik, Mohamad Syamsi and Khan, Sheroz and Nordin, Anis Nurashikin and Zainuddin, Ahmad Anwar (2014) Design and simulation of 10 MHz MEMS oscillator. In: 2014 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 12th-15th May 2014, Pisa, Italy .

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Abstract

Design and analysis of a 10MHz oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with an amplifier circuit. The OP AMP achieves a gain of 1.8 V and VSS of -1.8 V. The two-stage CMOS OP AMP is combined with 10MHz CC-beam resonator to create and oscillator at the frequency of ~10MHz with loop gain of 16 dB.The oscillator is simulated using Cadence Design Systems.

Item Type:	Conference or Workshop Item (Plenary Papers)
Additional Information:	3930/39245
Uncontrolled Keywords:	Two-stage CMOS op amp, CC-beam resonator, MEMS-based oscillator, Cadence
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	26 Nov 2014 11:34
Last Modified:	05 Jun 2016 15:31
URI:	http://irep.iium.edu.my/id/eprint/39245

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