RF CMOS-MEMS cantilever resonator

Zainuddin, Ahmad Anwar and Karim, Jamilah and Nordin, Anis Nurashikin and Taufik, Mohamad Syamsi and Pandian, Mohanraj and Khan, Sheroz (2013) RF CMOS-MEMS cantilever resonator. In: 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA), 26-27 Nov 2013, Kuala Lumpur.

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Abstract

This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000.

Item Type:	Conference or Workshop Item (Plenary Papers)
Additional Information:	3239/36871 (ISBN: 978-1-4799-0842-4, DOI: 10.1109/ICSIMA.2013.6717939)
Uncontrolled Keywords:	resonators, oscillators, beam's displacement, gain, RF-MEMS
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	09 Jun 2014 15:38
Last Modified:	05 Jun 2016 15:22
URI:	http://irep.iium.edu.my/id/eprint/36871

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