High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy

Saleh, Tanveer (2012) High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy. In: International Conference on Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 2012, Paris.

PDF - Published Version Restricted to Registered users only Download (1MB) | Request a copy

Abstract

This work investigates reverse-polarity dry microelectro- discharge machining (μEDM) of pure carbonnanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional μEDM where the material to be machined forms the anode. The new configuration with the reversed polarity is observed to generate higher discharge currents, most likely due to effective field-emission from CNTs. This effect allows the process to be performed at very low discharge energies, ~80× smaller than in the conventional normal-polarity case, with the machining voltage and tolerance down to 10 V and 2.5 μm, respectively, enabling high-precision high-aspect-ratio micropatterning in the forests.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	6808/30325
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) > TA2001 Plasma engineering. Applied plasma dynamics
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering
Depositing User:	Dr. Tanveer Saleh CEng MIMechE
Date Deposited:	11 Sep 2013 12:21
Last Modified:	11 Sep 2013 12:48
URI:	http://irep.iium.edu.my/id/eprint/30325

Actions (login required)

View Item