Geometrical integrity of microholes produced by micro-EDM

Ali, Mohammad Yeakub (2008) Geometrical integrity of microholes produced by micro-EDM. Research Report. Research Management Center, IIUM, Kuala Lumpur. (Unpublished)

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Abstract

Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, etc. influence the fluid flow inside the channels. This project (EDW-17) was followed by project of EDW-18, where EDM micro drilling process was developed. In this research project the high aspect ratio EDM drilled micro holes were measured and investigated. At first, an experimental process was developed to open the internal geometry of the holes and then characterized the geometrical integrity and surface texture using scanning electron microscope (SEM) and atomic force microscope (AFM).

Item Type:	Monograph (Research Report)
Additional Information:	4751/28924
Uncontrolled Keywords:	monograph, geometrical integrity
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	02 Sep 2013 15:29
Last Modified:	02 Sep 2013 15:29
URI:	http://irep.iium.edu.my/id/eprint/28924

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