Micro-drilling of metallic materials for microsystems technology

Ali, Mohammad Yeakub (2008) Micro-drilling of metallic materials for microsystems technology. Project Report. Research Management Center, IIUM, Kuala Lumpur. (Unpublished)

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Abstract

This research project focused on the use of micro-EDM to create micro-holes with different aspect ratio (depth/diameter). It examined the influence of various factors on the final accuracy in EDM micro drilling. In particular, the main parameters affecting the aspect ratio, vertical side wall, size and position of the hole were investigated. Beryllium copper which is widely used for the fabrication of microcavity for MEMS replication was used as substrate. The drilled holes are useful in Bio-MEMS and microfludic analysis.

Item Type:	Monograph (Project Report)
Additional Information:	4751/28923
Uncontrolled Keywords:	micro-EDM
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	14 Nov 2013 08:50
Last Modified:	14 Nov 2013 08:50
URI:	http://irep.iium.edu.my/id/eprint/28923

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