Fabrication of micromold cavity for microreplication: A review

Ali, Mohammad Yeakub and Khan, Ahsan Ali and Mehfuz, R. and Aishah, S. and Hayati, N. and Hajar, N. (2008) Fabrication of micromold cavity for microreplication: A review. In: International Conference on Mechanical and Manufacturing Engineering (ICME 2008), 21-23 May 2008, Johor Bahru, Malaysia.

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Abstract

In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro discharge machining, laser micromachining, tool based micromilling, etc., become cost effective and popular. These micromold cavities were used for mass production of microcomponents. The fabrication processes, advantages and disadvantages of these processes are discussed in this paper. The processes are also compared for the ease of process selection for a particular fabrication.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4751/27157
Subjects:	T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	06 Sep 2013 09:23
Last Modified:	06 Sep 2013 09:23
URI:	http://irep.iium.edu.my/id/eprint/27157

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