Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach

Ali, Mohammad Yeakub and Loo, Yee Wei (2007) Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach. Microsystems Technologies, 13 (1). pp. 103-107. ISSN 0946-7076

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Abstract

This paper discusses the investigation of geometrical integrity of micromold cavity produced by focused ion beam (FIB) sputtering slice by slice. Parabolic shaped micromold cavity was chosen as an example. Preliminary experiments were carried out to characterize the machine and select the optimum process parameters such as beam current, pixel spacing, aperture size, and dwell time. The geometrical integrity of the sputtered micromold cavity was analyzed based on three selected criteria such as aspect ratio, cross-sectional area, and area offset. The theoretical and sputtered profiles were compared. The investigation showed that the measured aspect ratio was almost equal to the theoretical aspect ratio for low aspect ratio microcavity. For high aspect ratio cavity, the measured aspect ratio was higher than the theoretical aspect ratio by 5–8%. The area offset was found to be 5–10% of the theoretical area. The variation in theoretical and sputtered cross-sectional area was 2–4%. The characterization showed that the geometrical integrity of micromold cavity sputtered by FIB using slicing approach was high.

Item Type:	Article (Journal)
Additional Information:	4751/27097
Uncontrolled Keywords:	Focused ion beam (FIB) sputtering; Micromold cavity; Multilayer slicing; Process parameters
Subjects:	T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	24 Jul 2013 09:25
Last Modified:	24 Jul 2013 09:25
URI:	http://irep.iium.edu.my/id/eprint/27097

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