Micro-hotplate based temperature stabilization system for CMOS SAW resonators

Nordin, Anis Nurashikin and Voiculescu, Ioana and Zaghloul, Mona E. (2009) Micro-hotplate based temperature stabilization system for CMOS SAW resonators. Microsystems Technologies, 15 (8). pp. 1187-1193. ISSN 0946-7076 (Print), 1432-1858 (Online)

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Abstract

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon heaters. The first approach employs the oven control temperature stabilization scheme. Using this approach, the device’s temperature is elevated using on-chip heaters to Tmax = 42°C to maintain constant device temperature. Both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/°C has been reduced to -23.19 ppm/°C when heated to 42°C. The second scheme uses a feedback control circuit to switch the onchip heaters on and off depending on the ambient temperature. This method provided reduction of the TCF from -165.38 ppm/°C, to -93.33 ppm/°C. Comparison of both methods was also provided.

Item Type:	Article (Journal)
Additional Information:	3239/1939
Uncontrolled Keywords:	Surface acoustic wave (SAW), thermal, CMOS
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	13 Sep 2011 11:43
Last Modified:	13 Sep 2011 11:43
URI:	http://irep.iium.edu.my/id/eprint/1939

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