Enhancing sensitivity in flexible MEMS capacitive pressure sensors: a review

Hajizi, H. M. M. and Aris, H. and Ismail, M. H. and Nor, N. I. M. and Nordin, Anis Nurashikin and Jamel, N. and Johari, S. and Aziz, A. A. (2025) Enhancing sensitivity in flexible MEMS capacitive pressure sensors: a review. In: 1st International Symposium on Microelectronic Engineering and Design 2024, isMED 2024, 2-3 December 2024, Pulau Pinang.

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Abstract

vancements focus on material innovations like graphene and silver nanowires, structural designs such as pyramidal microstructures and interdigitated electrodes, and fabrication techniques like laser-induced graphene and multilayer architectures. These approaches improve sensitivity, broaden detection ranges, and enhance response times. Despite progress, challenges in stability and fabrication complexity remain. This review summarises current strategies, offering insights into advancing sensor performance for emerging applications.

Item Type:	Proceeding Paper (Other)
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering Kulliyyah of Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	18 Sep 2025 12:44
Last Modified:	18 Sep 2025 12:44
URI:	http://irep.iium.edu.my/id/eprint/123253

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