Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

Muhamad Suki, Nur Sa'adah and Herman, Sukreen Hana and Ani, Mohd Hanafi and Mahmood, Mohamad Rusop (2012) Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power. Advanced Materials Research, 576 (2012). pp. 598-601. ISSN 1022-6680

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Abstract

ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power. It is observed that the deposition rate increased as the temperature and RF power increased. FE-SEM images confirmed that microstructure of the thin films consists of nanoparticles. XRD data confirmed that the ZnO thin films at various RF power and substrate temperature have (002) structure.

Item Type:	Article (Journal)
Additional Information:	4583/27469
Uncontrolled Keywords:	ZnO thin films, RF magnetron sputtering, substrate temperatures, RF power, structural properties.
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Dr Mohd Hanafi Ani
Date Deposited:	17 Dec 2012 15:52
Last Modified:	19 Feb 2013 10:39
URI:	http://irep.iium.edu.my/id/eprint/27469

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