Amin, A. K. M. Nurul and Khalid, Noor Syairah and Mohd Nasir, Siti Nurshahida and Arif, Muammer Din
(2012)
Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon.
Advanced Materials Research, 576.
pp. 11-14.
ISSN 1022-6680
Abstract
Machining of silicon is an expensive affair because its inherent brittleness leads to
subsurface crack generation. Research endeavours have therefore focused on ductile mode
machining of silicon to obtain crack free machined surfaces with roughness as low as 0.22 μm or
even below, hence eliminating the need for subsequent polishing/grinding operations. However,
most of these research works utilized expensive ultraprecision machines and tools. This research
aimed at determining the viability of using conventional milling machines with diamond coated
tools, high speed attachments, and air blowing mechanisms in order to achieve ductile regime
machining of silicon. Spindle speed, depth of cut, and feed rate, ranges: 60,000 to 80,000 rpm, 10 to
20 μm, and 5 to 15 mm/min respectively, were considered as the independent machining
parameters. Compressed air at 0.35 MPa was also provided to prevent chip deposition on the finished surfaces. The resultant surfaces were analysed using Optical and Scanning Electron Microscopes. Then, the influence of each machining parameter on surface roughness was investigated. From the analyses it was concluded that all three machining parameters and air blowing had significant influence on the surface topography and integrity of silicon.
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