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Article
Za'bah, Nor Farahidah and Kwa, Kelvin S. K. and O'Neill, Anthony (2013) Optimization of the process modules for a top-down silicon nanowire fabrication using optical lithography and orientation dependent etching. Advanced Materials Research, 629. pp. 115-121. ISSN 1022-6680
Za'bah, Nor Farahidah and Kwa, Kelvin S. K. and Bowen, Leon and Mendis, Budhika and O'Neill, Anthony (2012) Top-down fabrication of single crystal silicon nanowire using optical lithography. Journal of Applied Physics, 112. 024309-024309. ISSN 0021-8979
Proceeding Paper
Za'bah, Nor Farahidah and Kwa, Kelvin S. K. and O'Neill, Anthony (2013) The study on the aspect ratio of Atomic Force Microscope (AFM) measurements for Triangular Silicon Nanowire. In: 2013 IEEE Regional Symposium on Micro and Nano Electronics (RSM 2013), 25-27 September 2013, Langkawi, Malaysia. (In Press)