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Za'bah, Nor Farahidah and Kwa, Kelvin S. K. and O'Neill, Anthony (2013) Optimization of the process modules for a top-down silicon nanowire fabrication using optical lithography and orientation dependent etching. Advanced Materials Research, 629. pp. 115-121. ISSN 1022-6680
Za'bah, Nor Farahidah and Kwa, Kelvin S. K. and O'Neill, Anthony (2013) The study on the aspect ratio of Atomic Force Microscope (AFM) measurements for Triangular Silicon Nanowire. In: 2013 IEEE Regional Symposium on Micro and Nano Electronics (RSM 2013), 25-27 September 2013, Langkawi, Malaysia. (In Press)
Za'bah, Nor Farahidah and Kwa, Kelvin S. K. and Bowen, Leon and Mendis, Budhika and O'Neill, Anthony (2012) Top-down fabrication of single crystal silicon nanowire using optical lithography. Journal of Applied Physics, 112. 024309-024309. ISSN 0021-8979