Fabrication of dual- and single-layer piezo resistive micro cantilever sensor

Ab Rahim, Rosminazuin and Bais, Badariah and Majlis, Yeop Burhanuddin (2015) Fabrication of dual- and single-layer piezo resistive micro cantilever sensor. ARPN Journal of Engineering and Applied Sciences, 10 (15). pp. 6274-6278. ISSN 1819-6608

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Abstract

In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and single-layer has opened up the opportunity for device improvement especially in fabrication methods for simpler and reduced process steps. In single-layer design, the fabrication at reduced process steps which offers simpler and reproducible device has been successfully realized. This design offers simpler fabrication process by not only reducing the number of process steps but also eliminating the common fabrication issues encountered in bulk micromachining technology. With the development of single-layer doped silicon PRM sensor, the thermal strain issue, due to mismatch in coefficients of thermal expansion of multi-layered structure is not an issue. The novelty of this work lies in the design itself, in which the single-layer dual leg design not only simplifies the fabrication work, but also promotes an efficient current distribution along the piezoresistive dual-leg structure which is integrated with Wheatstone bridge configuration.

Item Type:	Article (Journal)
Additional Information:	4269/44474
Uncontrolled Keywords:	piezoresistor, microcantilever, MEMS
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) > TA168 Systems engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Rosminazuin Ab Rahim
Date Deposited:	02 Sep 2015 14:58
Last Modified:	13 Oct 2015 12:52
URI:	http://irep.iium.edu.my/id/eprint/44474

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