Squeeze-film hydrogel deposition and dry micropatterning

Ding, Zhenweng and Wan Salim, Wan Wardatul Amani and Ziaie, Babak (2010) Squeeze-film hydrogel deposition and dry micropatterning. Analytical Chemistry, 82 (8). pp. 3377-3382. ISSN 0003-2700 E-ISSN 1520-6882

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Abstract

In this technical note, we demonstrate a squeeze-film based spacer-free method for creating controllable submicrometer hydrogel films on planar substrates that can be used to photolithographically fabricate hydrogel microstructures. This new technique improves the photolithographic resolution and yield by providing a uniform and low-defect hydrogel film. The optimum polymerization initiation time for achieving such a layer was determined to be around 1 min. For patterning, the dried hydrogel film was coated with a parylene-C masking layer. Subsequent etching in oxygen plasma was used to transfer selected patterns of hydrogel to the substrate in a batch scale.

Item Type:	Article (Journal)
Additional Information:	7116/44324
Uncontrolled Keywords:	Squeeze-Film Hydrogel Deposition
Subjects:	Q Science > QC Physics
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Biotechnology Engineering
Depositing User:	Dr Wan Wardatul Amani Wan Salim
Date Deposited:	15 Sep 2017 11:59
Last Modified:	15 Sep 2017 15:30
URI:	http://irep.iium.edu.my/id/eprint/44324

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