Theoretical design of CMOS SAW resonator

Soeroso, Iksannurazmi Bambang and Nordin, Anis Nurashikin (2012) Theoretical design of CMOS SAW resonator. In: International Conference on Computer and Communication Engineering (ICCCE 2012), 3-5 July 2012, Seri Pacific Hotel Kuala Lumpur.

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Abstract

Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to design the SAW devices using complementary metal-oxide semiconductor (CMOS) or integrated circuit fabrication techniques. This allows the SAW device to be integrated with circuits, yielding low cost and small device size. Generally, a separate deposition steps is being used to implement resonator's interdigital fingers (IDT). This work presents the theoretical model of a SAW resonator designed in CMOS technology. The device will be designed to minimize losses due to the piezoelectric material and to achieve high quality factors. Critical device parameters such as periodic spacing, number of transducers and reflectors are calculated based on the device's design equations. The admittance and frequency response of the device is also modeled based on the theoretical equations.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	3239/29299 Digital Object Identifier : 10.1109/ICCCE.2012.6271268 Print ISBN: 978-1-4673-0478-8
Uncontrolled Keywords:	Interdigital Transducer (IDT), equivalent circuit, surface acoustic wave (SAW) resonator, Silicon Dioxide (SiO2)
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Nur' Aini Abu Bakar
Date Deposited:	28 Feb 2013 07:53
Last Modified:	28 Feb 2013 07:53
URI:	http://irep.iium.edu.my/id/eprint/29299

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