Fabrication and characterization of sub polymeric microring resonators for biosensors

Mohd Salleh, Mohd Hazimin and Cooper, Jonathan M and Glidle, Andrew (2009) Fabrication and characterization of sub polymeric microring resonators for biosensors. In: 5th IEEE EMBS UK & Republic of Ireland Postgraduate Conference on Biomedical Engineering and Medical Physics, 12th - 14th July, 2009, Oxford University.

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Abstract

In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography showing the fabrication of microring with 200μm of radius with a 200nm critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses was performed by using HeNe laser 632.8 nm of wavelengths. Future work on microring resonator characterization and optimisation, including optimisation of the Q factor, resonance wavelength shift using visible wavelength are currently in progress.

Item Type:	Conference or Workshop Item (Lecture)
Additional Information:	4794/12513
Uncontrolled Keywords:	Polymeric; biosensors
Subjects:	Q Science > Q Science (General) Q Science > QC Physics
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Science
Depositing User:	Dr. Mohd. Hazimin Mohd. Salleh
Date Deposited:	25 Jan 2012 08:56
Last Modified:	18 May 2012 08:41
URI:	http://irep.iium.edu.my/id/eprint/12513

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