Mechanical loss reduction at low temperature after crystallization in a titania-tantala film

Murray, Peter G. and Steinlechner, Jessica and Isa, Hafizah Noor and Cummings, Rebecca B. and Robie, Raymond and Craig, Kieran and Abernathy, Matthew R. and Bassir, Riccardo and Fejer, Martin M. and Hough, James and MacLaren, Ian and Rowan, Sheila and Martin, Iain W. (2025) Mechanical loss reduction at low temperature after crystallization in a titania-tantala film. Physical Review D, 111 (4). pp. 1-19. ISSN 2470-0010

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Abstract

Due to its excellent optical properties, such as low absorption and scattering, amorphous Ta2O5 is commonly used as an optical coating material, often in combination with SiO2 layers to produce a highly reflective stack. However, the high mechanical loss of Ta2O5 limits the thermal-noise performance of such coatings when used in precision measurement applications. Doping with TiO2 has previously been shown to slightly reduce the mechanical loss, but it is still very high compared to many other materials, particularly at low temperatures. In this paper, we present a detailed study of different heat treatment temperatures and of Ti concentrations of up to nominally 75%. We show a significant mechanical-loss reduction for the mixture with the highest Ti cation content, which crystallized after heat treatment at 500°C. The resulting loss is much lower than that of pure TiO2 or that of Ta2O5 after crystallization, making further studies highly interesting, in particular investigations of scattering which may pose a major drawback for optical applications

Item Type:	Article (Review)
Subjects:	Q Science > QC Physics
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Science > Department of Physics
Depositing User:	DR Hafizah Noor Isa
Date Deposited:	27 Nov 2025 15:58
Last Modified:	27 Nov 2025 15:58
Queue Number:	2025-11-Q263
URI:	http://irep.iium.edu.my/id/eprint/124771

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