Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor

Ma, Li Ya and Nordin, Anis Nurashikin and Khan, Sheroz (2011) Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor. In: 2011 IEEE Symposium Design, Test and Packaging of MEMS and MOEMS, 11-13 May 2011, Aix-en-Provence, France.

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Abstract

This paper presents the design and analysis of an integrated oversampling converter with MEMS capacitive sensor. The MEMS capacitive sensor is a comb-drive which provides change in capacitance when change in acceleration is detected. The analog-to-digital converter (ADC) is a first-order 1-bit sigma-delta (Σ-Δ) converter. Σ-Δ ADCs are suitable for MEMS sensors since their output voltage are in mV and are low frequencies. Both the Σ-Δ ADC and MEMS capacitive sensor were designed in Silterra’s 0.13μm CMOS process. Simulation of the Σ-Δ ADC was conducted using CadenceTM Spectre, while the MEMS sensor was simulated by COMSOL Multiphysics®. Results indicate that the Σ-Δ ADC can process small voltage output of the MEMS sensor and convert it into digital signals satisfactorily.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	3239/9825
Uncontrolled Keywords:	CMO-MEMs
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	12 Jan 2012 16:39
Last Modified:	12 Jan 2012 16:41
URI:	http://irep.iium.edu.my/id/eprint/9825

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