Influence of mixed convection in atmospheric pressure chemical vapor deposition of graphene growth

Fauzi, Fatin Bazilah and Ismail, Edhuan and Osman, Muhammad Naqib and Rosli, Muhammad Suffian and Ismail, Ahmad Faris and Mohamed, Mohd Ambri and Syed Abu Bakar, Syed Noh and Ani, Mohd Hanafi (2019) Influence of mixed convection in atmospheric pressure chemical vapor deposition of graphene growth. In: Nanotech Malaysia 2018 in conjunction with 3rd International Conference on Enabling Science and Nanotechnology (ESciNano 2018), 5th Malaysia Workshop on 2D Materials and Carbon Nanotube (2DMC 2018), 7th-9th May 2018, Kuala Lumpur.

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Abstract

Chemical vapor deposition (CVD) is a well-known process as the most favourable for high-quality large area graphene production. However, it is a complex method where each parameter will contribute to significant effect on the deposition process. One of them, fluid dynamics, was reported to be one of the major governing factors for better deposition. Heat transfer process at high temperature will influence gas phase dynamics during the deposition process. In this study, the influence of mixed convection in atmospheric pressure CVD (APCVD) on the graphene quality has been systematically investigated. Reynolds number was calculated to identify the gas flow regime as well as to see its effects on the graphene quality. Then, the type of dominant convection inside the reactor was determined using Richardson number (Grashof number/Reynolds number squared). Changes in graphene quality were then observed by Raman spectra at various values of Reynolds and Richardson numbers. Additionally, computational fluid dynamics (CFD) calculations were also performed to observe the temperature and velocity contour during deposition. We then discuss the vital thermal-fluid dynamic characteristics required for an optimal graphene growth. We highlighted that a force convection in APCVD was vital for better quality of graphene.

Item Type:	Conference or Workshop Item (Plenary Papers)
Additional Information:	1743/71183
Uncontrolled Keywords:	Graphene; APCVD; Heat transfer; Mixed convection; CFD
Subjects:	T Technology > T Technology (General)
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering Kulliyyah of Engineering > Department of Mechanical Engineering
Depositing User:	Dr Mohd Hanafi Ani
Date Deposited:	21 Mar 2019 16:14
Last Modified:	26 Nov 2019 12:26
URI:	http://irep.iium.edu.my/id/eprint/71183

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