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Design and optimization of a MEMS quartz mass sensor array for biosensing

Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin and Md Ralib, Aliza Aini and Ab Rahim, Rosminazuin and Khan, Sheroz and Guines, Cyril and Chatras, Matthieu and Pothier, Arnaud (2018) Design and optimization of a MEMS quartz mass sensor array for biosensing. In: 4th IEEE International Conference on Smart Instrumentation, Measurement and Applications, ICSIMA 2017, 28 - 30 November 2017, Putrajaya.

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Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design, optimization and simulation of a MEMS quartz mass (QCM) sensor array. A circular mass sensor placed in an array of four sensors with working electrode radius, r = 100ȝm and centre to centre distance between electrodes, s=2.5mm was designed. Based on COMSOL simulations, resonance frequency of 10.40MHz and mass sensitivity of 0.223 Hz.cm2.ng-1 in liquids was obtained. Simulations indicate the best placement of the quadruple MEMS sensors in an array such that their signals do not interfere with each other. Low degradation of resonance frequency up to 40 kHz was observed based on simulation results.

Item Type: Conference or Workshop Item (Plenary Papers)
Additional Information: 3239/67267
Uncontrolled Keywords: MEMS; QCM array; Liquid; Mass sensitivity;Biosensor
Subjects: T Technology > TA Engineering (General). Civil engineering (General) > TA168 Systems engineering
T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): Kulliyyah of Engineering
Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User: Dr. Anis Nurashikin Nordin
Date Deposited: 31 Oct 2018 16:11
Last Modified: 31 Oct 2018 16:33
URI: http://irep.iium.edu.my/id/eprint/67267

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