Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator

Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin (2016) Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator. In: 6th International Conference on Computer and Communication Engineering (ICCCE 2016), 25th-27th July 2016, Kuala Lumpur.

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Abstract

This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS approach namely deposition of 3.78 m thickness of Al doped Zinc Oxide (AZO) thin film, photolithography and wet etching. S-parameter measurements shows the series resonance frequency occurred at 1.156 GHz, 1.098 GHz and 0.966 GHz for three different wavelength respectively. The influence of acoustic wavelength on resonance frequency, acoustic wave velocity and electromechanical coupling coefficient were discussed. The best transmission characteristic was observed by Resonator 3 due to highest coupling coefficient of 0.069% and lowest insertion loss of 40.5 dB. The range of extracted SAW velocity is between 4161 m/s to 4497 m/s. Hence, the measurement results are consistent with finite element simulation results with deviation less than 5% in terms of resonance frequency and acoustic wave velocity.

Item Type:	Conference or Workshop Item (Plenary Papers)
Additional Information:	7658/54613
Uncontrolled Keywords:	acoustic wavelengths, SAW resonator, Al doped ZnO, resonance frequency
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Aliza Aini Md Ralib
Date Deposited:	10 Feb 2017 09:09
Last Modified:	23 May 2017 15:57
URI:	http://irep.iium.edu.my/id/eprint/54613

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