Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator

Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin (2013) Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator. In: 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2013), 16th-18th Apr. 2013, Barcelona, Spain.

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Abstract

CMOS integration in RF MEMS have become dominant due to the growing demand of mobile and wireless communication system. Usage of off chip resonators is not efficient since it leads to large area and high interfacing loss. Integration of CMOS with SAW resonators is a possible solution to reduce the loss. In this work, a SAW resonator was developed using AZO/Al/Si layers in 0.18 μm CMOS technology. AZO was chosen as the piezoelectric layer to achieve high electromechanical coupling coefficient for good SAW performance. This paper highlights the comparative analysis of two different piezoelectric materials: pure Zinc Oxide (ZnO) and Aluminium doped Zinc Oxide (AZO) for GHz CMOS MEMS SAW resonator. S parameter measurements were performed for the fabricated designs to get the resonance frequencies and the electromechanical coupling coefficients were recalculated. The design and finite element modeling simulation was conducted using COMSOLTM to verify the performance of the resonator using both Al-doped ZnO and pure ZnO via the simulation results.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4575/46637 (ISBN : 978-1-4673-4477-7)
Uncontrolled Keywords:	Comparative analysis; Doped zinc oxides; Electromechanical coupling coefficients; Mobile and wireless communication; Piezoelectric layers; Resonance frequencies; S-Parameter measurements; Surface acoustic wave resonators
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	07 Jan 2016 14:26
Last Modified:	15 Apr 2016 17:34
URI:	http://irep.iium.edu.my/id/eprint/46637

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