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Equivalent circuit modeling of two-port Al-doped Zinc Oxide CMOS SAW resonator using MATLAB™

Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Hashim, Uda (2013) Equivalent circuit modeling of two-port Al-doped Zinc Oxide CMOS SAW resonator using MATLAB™. In: 2013 IEEE International Conference on Circuits and Systems (ICCAS 2013), 18th-19th Sept. 2013, Kuala Lumpur.

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The accelerated growth of wireless communication system has increased the interest of research in CMOS integration in RF MEMS. A complete integrated silicon based resonator potentially eliminates lossy interfacing to on chip electronics. This paper presents the equivalent circuit modeling of a CMOS SAW resonator implemented in 0.35 μm CMOS technology. The periodic spacing of the IDTs based on the CMOS technology controls the resonance frequency of the resonator. Four different resonators at frequency range of 0.750 GHz to 1.125 GHz were simulated using MATLABTM based on theoretical equations. High quality factors and low insertion loss is crucial to optimize the performance of the SAW resonator. Crucial design parameters such as periodic spacing, number of reflectors, array of reflectivity and coupling coefficient are highlighted. The simulated results shows high quality factor in the order of thousands and low insertion loss, which is crucial to optimize the performance of the Al doped ZnO CMOS SAW resonator.

Item Type: Conference or Workshop Item (Full Paper)
Additional Information: 4575/46636 (ISBN : 978-1-4799-1337-4, DOI: 10.1109/CircuitsAndSystems.2013.6671581)
Uncontrolled Keywords: Admittance; Array of reflectivity; CMOS; Quality factor; Radiation conductance; Resonance frequency; SAW resonator
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User: Dr. Anis Nurashikin Nordin
Date Deposited: 07 Jan 2016 14:34
Last Modified: 15 Apr 2016 17:33
URI: http://irep.iium.edu.my/id/eprint/46636

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