Piezoelectric characteristics of CMOS compatible AIN SAW resonators

Md Ralib @ Md Raghib, Aliza 'Aini and Pandian, Mohanraj Saundara and Ferrer, Eloi Mariago and Song, Charlie TayWee and Shunmugam, Muniandy and Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin (2014) Piezoelectric characteristics of CMOS compatible AIN SAW resonators. In: 2014 Asia-Pacific Microwave Conference (APMC 2014), 4th-7th Nov 2014, Sendai, Japan.

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Abstract

In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AIN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AIN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v∼5220 m/s) and coupling factors (k2∼0.19%) can be observed for SAW resonator with khAIN∼ 3.9. The measurement results are found to be consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Additional Information:	3239/45296 (ISBN: 9784902339314)
Uncontrolled Keywords:	Aluminium Nitride, CMOS, piezoelectric, surface acoustic wave, coupling coefficient
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	20 Nov 2015 09:31
Last Modified:	27 Sep 2017 12:17
URI:	http://irep.iium.edu.my/id/eprint/45296

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