Design and modeling of MEMS SAW resonator on Lithium Niobate

Ramli, Noor Amalina and Nordin, Anis Nurashikin (2011) Design and modeling of MEMS SAW resonator on Lithium Niobate. In: 4th International Conference on Mechatronics: Integrated Engineering for Industrial and Societal Development (ICOM 2011), 17-19 May, 2011, Kuala Lumpur, Malaysia.

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Abstract

Surface Acoustic Wave (SAW) resonators are essential components for modern communication systems. They can function as filters and frequency synthesizers. SAW resonators operate based on the principle of acoustic waves propagating along the surface of a solid piezoelectric material. The waves are generated by injecting electrical energy using interdigitated transducers (IDTs) into the piezoelectric material which transforms it into propagating mechanical waves. This project intends to study the key design parameters that affect the performance of SAW resonator such as optimum spacing between IDT and reflector, optimum spacing of IDTs and the numbers of reflector in order to get the highest mechanical displacement. Key requirements of a SAW resonator include having precise resonant frequency (fr), low insertion losses, and high quality factors (Q). To meet these requirements, it is necessary to investigate the key design parameters; number of reflectors, number of IDTs, periodic distance of transducer fingers ( #x03BB;), spacing between IDT and reflector. Finite element simulations to determine the optimum SAW resonator design was performed using COMSOL Multiphysics #x2122;.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	3239/3732
Uncontrolled Keywords:	COMSOL Multiphysics;MEMS SAW resonator;acoustic waves;electrical energy;filters;frequency synthesizers;interdigitated transducer;lithium niobate;mechanical displacement;modern communication system;propagating mechanical waves;resonant frequency;solid piezoelectric material;surface acoustic wave resonator;transducer fingers;frequency synthesizers;micromechanical devices;piezoelectric materials;surface acoustic wave resonators;
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	23 Sep 2011 10:43
Last Modified:	20 Aug 2013 12:19
URI:	http://irep.iium.edu.my/id/eprint/3732

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