Novel MEMS fully differential capacitive transducer design and analysis

Ya, Ma Li and Khan, Sheroz and Nordin, Anis Nurashikin and Al-Khateeb, Khalid A. Saeed and Islam, Md. Rafiqul and Naji, Ahmed Wathik (2011) Novel MEMS fully differential capacitive transducer design and analysis. In: 2011 4th International Conference on Mechatronics: Integrated Engineering for Industrial and Societal Development (ICOM 2011), 17-19 May, 2011, Kuala Lumpur, Malaysia.

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Abstract

This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Additional Information:	3930/3731 (Print ISBN: 978-1-61284-435-0, DOI: 10.1109/ICOM.2011.5937152)
Uncontrolled Keywords:	MEMS; differential capacitive sensor; CMOS
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	07 Oct 2011 09:33
Last Modified:	18 Aug 2017 11:16
URI:	http://irep.iium.edu.my/id/eprint/3731

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