On-chip hotplate for temperature control of CMOS SAW resonators

Nordin, Anis Nurashikin and Voiculescu, Ioana and Zaghloul, Mona E. (2008) On-chip hotplate for temperature control of CMOS SAW resonators. In: Design, Test, Integration and Packaging of MEMS/MOEMS, 2008, April 9-11, 2008, Nice, French Riviera, France.

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Abstract

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistors as a method of temperature control for CMOS SAW resonators. The design employs the oven control temperature stabilization scheme where the devicepsilas temperature is elevated to higher than Tmax to maintain constant device temperature. The efficiency of the polysilicon resistor as a heating element was verified through a 1-D partial differential equation model, 3-D CoventorWarereg finite element simulations and measurements using Compixreg thermal camera. To verify that the on-chip hotplate is effective as a temperature control method, both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/degC has been reduced to -23.19 ppm/degC when heated to 56degC.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	3239/3717
Uncontrolled Keywords:	1-D partial differential equation model;3-D CoventorWare;CMOS SAW resonators;Compix thermal camera;Si;finite element simulations;heat treatment;heating element;integrated dual-serpentine polysilicon resistors;on-chip hotplate;oven control temperature stabilization scheme;piezoelectric layer;finite element analysis;heat treatment;partial differential equations;piezoelectric materials;surface acoustic wave resonators;
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	27 Oct 2011 10:33
Last Modified:	27 Oct 2011 12:24
URI:	http://irep.iium.edu.my/id/eprint/3717

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