Simulations of surface and bulk acoustic wave MEMS biosensors

Jamil, Nadira and Nordin, Anis Nurashikin and Voiculescu, Ioana and Mel, Maizirwan (2010) Simulations of surface and bulk acoustic wave MEMS biosensors. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 5-7 May 2010, Seville, Spain.

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Abstract

Traditionally a telecommunication device, the emerging application of acoustic wave devices as sensors is rapidly gaining attention due to its high sensitivities. In this work, a comparative study of surface (SAW) and bulk (BAW) acoustic wave biosensors is presented. The MEMS SAW resonator is formed using a lithium niobate substrate with Al electrodes while the BAW resonator is formed using quartz substrate with gold electrodes. Finite element simulations of a 290 MHz SAW and a 220 MHz BAW resonator were performed using COMSOL Multiphysics #x2122;. Both models were simulated to determine their resonance frequency and frequency shift due to the loading of DF-1 animal cells, a biological material. The structure of the SAW device allows an additional transient simulation, which provides information regarding the acoustic wave propagation delay due to the presence of the cells. From the simulations it was observed that the SAW device yielded 2.8 MHz frequency shift ( #x0394;f) due to the cells while the BAW device provided #x0394;f of 2.7 MHz. The propagation delay in the SAW resonator due to the cells was simulated to be 3.5 ns.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	3239/3711
Uncontrolled Keywords:	BAW;COMSOL Multiphysics;MEMS SAW resonator;SAW;acoustic wave propagation delay;bulk acoustic wave MEMS biosensors;finite element simulations;frequency 2.8 MHz;frequency 220 MHz;frequency 290 MHz;gold electrodes;lithium niobate substrate;quartz substrate;surface acoustic wave MEMS biosensors;time 3.5 ns;bioMEMS;biosensors;bulk acoustic wave devices;electrodes;finite element analysis;lithium compounds;surface acoustic wave sensors;
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Biotechnology Engineering Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	22 Sep 2011 09:18
Last Modified:	22 Sep 2011 09:18
URI:	http://irep.iium.edu.my/id/eprint/3711

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