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Simulation of a MEMS piezoelectric energy harvester

Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Salleh, Hanim (2010) Simulation of a MEMS piezoelectric energy harvester. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP 2010), 5-7 May 2010, Seville, Spain.

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Abstract

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions.

Item Type: Conference or Workshop Item (Full Paper)
Additional Information: 3239/3707 (ISBN: 978-1-4244-6636-8)
Uncontrolled Keywords: MEMS piezoelectric energy harvester;ZnO;interdigitated electrodes;piezoelectric cantilever beam;portable electronic devices;III-V semiconductors;beams (structures);energy harvesting;micromechanical devices;piezoelectric devices;zinc compounds;
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes: Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User: Dr. Anis Nurashikin Nordin
Date Deposited: 22 Sep 2011 02:44
Last Modified: 17 Mar 2016 02:49
URI: http://irep.iium.edu.my/id/eprint/3707

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