Simulation of a MEMS piezoelectric energy harvester

Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Salleh, Hanim (2010) Simulation of a MEMS piezoelectric energy harvester. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP 2010), 5-7 May 2010, Seville, Spain.

PDF - Published Version Restricted to Repository staff only Download (3MB) | Request a copy

Abstract

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	3239/3707 (ISBN: 978-1-4244-6636-8)
Uncontrolled Keywords:	MEMS piezoelectric energy harvester;ZnO;interdigitated electrodes;piezoelectric cantilever beam;portable electronic devices;III-V semiconductors;beams (structures);energy harvesting;micromechanical devices;piezoelectric devices;zinc compounds;
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	22 Sep 2011 10:44
Last Modified:	17 Mar 2016 10:49
URI:	http://irep.iium.edu.my/id/eprint/3707

Actions (login required)

View Item