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Design and fabrication of Surface Acoustic Wave resonators on Lithium Niobate

Sidek, Fatini and Ramli, Noor Amalina and Nordin, Anis Nurashikin and Voiculescu, Ioana (2010) Design and fabrication of Surface Acoustic Wave resonators on Lithium Niobate. In: 2010 IEEE Student Conference on Research and Development (SCOReD 2010), 13-14 Dec 2010, Putrajaya, Malaysia.

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Abstract

Surface Acoustic Wave (SAW) resonators are essential components in communication devices and are used mainly as oscillators, frequency synthesizers and transceivers. Common piezoelectric substrates are quartz, Lithium Tantalate (LiTaO3) and Lithium Niobate (LiNbO3). In this paper we describe the design and fabrication of SAW resonators on LiNbO3. The design of the SAW resonators was simulated using COMSOL MultiphysicsTM. Two SAW resonators with resonance frequency of 218 MHz with varying number of reflectors were fabricated and measured. Measurements conducted using an RF Probe station and network analyzer yielded losses of -48.3 dB and -49.32 dB for Resonator 1 and Resonator 2 respectively.

Item Type: Conference or Workshop Item (Full Paper)
Additional Information: 3239/3706
Uncontrolled Keywords: COMSOL MultiphysicsTM;RF probe station;frequency 218 MHz;lithium niobate;network analyzer;noise figure -48.3 dB to -49.32 dB;surface acoustic wave resonators;lithium compounds;surface acoustic wave resonators;
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes: Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User: Dr. Anis Nurashikin Nordin
Date Deposited: 22 Sep 2011 01:52
Last Modified: 22 Sep 2011 01:52
URI: http://irep.iium.edu.my/id/eprint/3706

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