Design and optimization of a micro capacitive pressure sensor

Tahmasebpour, Kamyar and Shobaki, Mohammed M. and Hrairi, Meftah (2013) Design and optimization of a micro capacitive pressure sensor. In: 2nd International Conference on Mechanical, Automotive and Aerospace Engineering (ICMAAE 2013), 2-4 July 2013, Kuala Lumpur, Malaysia.

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Abstract

The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to protect the pressure sensor and system during pressure shocks, has a negligible effect on the membrane flexibility. Moreover, the simulation results show that the sensor exhibits a linear response with wide range of pressure from 0.01 MPa to 70 MPa. Furthermore, the simulation results yielded that the load-deflection responses could be enhanced using a spacer.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4980/32171
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) > TA165 Engineering instruments, meters, etc. Industrial instrumentation
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Mechanical Engineering
Depositing User:	Prof. Dr. Meftah Hrairi
Date Deposited:	18 Feb 2014 16:06
Last Modified:	18 Feb 2014 16:06
URI:	http://irep.iium.edu.my/id/eprint/32171

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