Design and modelling of silicon MEMS accelerometer

Hrairi, Meftah and Baharom, Badrul Hanafi (2013) Design and modelling of silicon MEMS accelerometer. International Journal of Engineering Systems Modelling and Simulation, 5 (4). pp. 181-187. ISSN 1755-9766

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Abstract

In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modelling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications.

Item Type:	Article (Journal)
Additional Information:	4980/32056
Uncontrolled Keywords:	component; micro electro mechanical systems; MEMS; finite element analysis; FEA; accelerometer; design; modelling.
Subjects:	T Technology > TJ Mechanical engineering and machinery > TJ181 Mechanical movements
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Mechanical Engineering
Depositing User:	Prof. Dr. Meftah Hrairi
Date Deposited:	30 Sep 2013 12:25
Last Modified:	18 Dec 2015 20:21
URI:	http://irep.iium.edu.my/id/eprint/32056

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