Diagonal control design for atomic force microscope piezoelectric tube nanopositioners

Bhikkaji, Bharath and Yong, Yuen Kuan and Mahmood, Iskandar Al-Thani and Moheimani, S.O. Reza (2013) Diagonal control design for atomic force microscope piezoelectric tube nanopositioners. Review of Scientific Instruments, 84 (2). 023705 (1)-023705 (8). ISSN 1089-7623 (O), 0034-6748 (P)

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Abstract

Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadvertently excited, these modes lead to high amplitude mechanical vibrations causing the loss of accuracy, while scanning, and eventually to break down of the tube. Feedback control has been used to damp these resonant modes. Thereby, enabling higher scanning rates. Here, a multivariable controller is designed to damp the first resonant mode along both the x and y axis. Exploiting the inherent symmetry in the piezoelectric tube, the multivariable control design problem is recast as independent single-input single-output (SISO) designs. This in conjunction with integral resonant control is used for damping the first resonant mode.

Item Type:	Article (Journal)
Additional Information:	3614/29069
Uncontrolled Keywords:	atomic force microscopy; control system synthesis; damping; feedback; integral equations; multivariable control systems; nanopositioning; piezoelectric devices; pipes; surface topography; vibration control
Subjects:	Q Science > Q Science (General) T Technology > TJ Mechanical engineering and machinery > TJ212 Control engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Mechatronics Engineering
Depositing User:	Dr. Iskandar Al-Thani bin Mahmood
Date Deposited:	17 Apr 2013 16:49
Last Modified:	17 Apr 2013 16:49
URI:	http://irep.iium.edu.my/id/eprint/29069

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