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Microstructure and electrical properties of AZO films prepared by RF magnetron sputtering

Bakri, Jufriadi and Sutjipto, Agus Geter Edy and Othman, Raihan and Muhida, Riza (2011) Microstructure and electrical properties of AZO films prepared by RF magnetron sputtering. Advanced Materials Research, 264-65. pp. 754-759. ISSN 1662-8985

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Abstract

AZO is an ideal replacement transparent conducting oxide (TCO) for ITO to all corresponding applications. The typical applications include: transparent electrodes for solar cells, flat panel displays, LCD electrodes, electro-magnetic compatibility (RF-EMI shielding) coatings, touch panel transparent contacts, static discharge dissipation. The production of useful and commercially attractive thin films using different deposition processes is very important parameter to investigate. A systematic study of the sputtering condition and their influenced on electrical and structural were studied. In this work, AZO films were deposited by RF magnetron sputtering at 200 °C. The result shows that the deposited time has influenced the characteristic of deposited AZO films. For a longer deposition time, thin film shows a uniform grain growth. The resistivity found minimum at the deposition time of 45 minutes. It can be considered that by reducing of the grain boundaries which enable the electron carries to conduct smoothly.

Item Type: Article (Journal)
Additional Information: 4703/2876
Uncontrolled Keywords: Aluminum doped zinc oxide (AZO) films, sputtering, deposition time
Subjects: T Technology > TA Engineering (General). Civil engineering (General) > TA401 Materials of engineering and construction
T Technology > TJ Mechanical engineering and machinery > TJ163.26 Energy conservation
T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Kulliyyahs/Centres/Divisions/Institutes: Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Kulliyyah of Engineering > Department of Mechatronics Engineering
Kulliyyah of Engineering > Department of Science
Depositing User: Raihan Othman
Date Deposited: 13 Sep 2011 12:32
Last Modified: 07 May 2012 21:40
URI: http://irep.iium.edu.my/id/eprint/2876

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