Fabrication of three dimensional micro-components – A review

Ali, Mohammad Yeakub and Hung, Wayne N.P. (2000) Fabrication of three dimensional micro-components – A review. In: 6th Annual Paper Meet & International Conference on Mechanical Engineering in the 21st Century , 17-19 February 2000, Dhaka, Bangladesh.

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Abstract

Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused ion beam (FIB) machining are mostly being used for the machining of two-dimensional (2D) and pseudo three dimensional (3D) micro-components. But it was more difficult to fabricate 3D micro-components with curved surfaces by these processes. In the recent years, LIGA (Lithography, Electroplating and Molding) technique has evolved as a promising method for mass fabrication of 3D micro-components at high expenses and investment. This paper reviews the available fabrication processes for 2D and 3D micro-components. It covers the fundamentals, applications and limitations of each process.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4751/27307
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	26 Aug 2013 16:10
Last Modified:	26 Aug 2013 16:10
URI:	http://irep.iium.edu.my/id/eprint/27307

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