Surface roughness of ion-sputtered micromold

Ali, Mohammad Yeakub and Bryan, N. K. A. and Hung, W. N. P. and Alauddin, M. and Yuan, S. (2001) Surface roughness of ion-sputtered micromold. In: International Conference on Mechanical Engineering (ICME) 2001, 26-28 December 2001, Dhaka, Bangladesh.

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Abstract

This paper discusses the development of mathematical models for the calculation of surface roughness of focused ion beam (FIB) sputtered microfeatures. The effective beam shape was characterized first and then the beam function was developed. Material function was developed from the inherent material properties. These two functions were then combined mathematically to develop the surface roughness models. The models were verified by sputtering single crystal silicon using 50 keV Ga ion FIB. The models were applied to fabricate microcavities which were successfully used for the replication of three dimensional (3D) polymer microcomponents.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4751/27302
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	03 Sep 2013 14:55
Last Modified:	03 Sep 2013 14:55
URI:	http://irep.iium.edu.my/id/eprint/27302

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