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Hot embossing and injection molding of three-dimensional microcomponents

Ali, Mohammad Yeakub and Ngoi, B. K. A. and Hung, N. P. and Yuan, S. and Lee, C.P. (2001) Hot embossing and injection molding of three-dimensional microcomponents. In: BSME-ASME International Conference on Thermal Engineering, 31 December 2001 - 02 January 2002, Dhaka, Bangladesh.

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This paper discusses hot embossing and injection molding microreplication processes for the fabrication of three dimensional (3D) microcomponents. These techniques included specialized tooling and variothermal process control. The microcavities were fabricated by focused ion beam (FIB) sputtering. Microgears, microgear trains, microlenses etc. were successfully replicated from polymers. The overall size of these microcomponents were few tens to few hundred micrometers. These replicated microcomponents were inspected with scanning electron microscope where submicrometer accuracy and faithful replication of cavity surface texture were observed.

Item Type: Conference or Workshop Item (Full Paper)
Additional Information: 4751/27184
Subjects: T Technology > TJ Mechanical engineering and machinery
T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User: Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited: 04 Sep 2013 10:37
Last Modified: 04 Sep 2013 10:37
URI: http://irep.iium.edu.my/id/eprint/27184

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