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Characterisation of surface texture using AFM with trimmed probe tip

Ali, Mohammad Yeakub and Lim, BengHai (2006) Characterisation of surface texture using AFM with trimmed probe tip. Surface Engineering, 22 (6). pp. 443-446. ISSN 0267-0844

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This paper discusses the scanning performance of a trimmed atomic force microscope (AFM) tip. A standard tip was trimmed by focused ion beam (FIB) sputtering to achieve a higher aspect ratio and sharpness. Microfeatures produced by FIB sputtering on a single crystal silicon substrate were scanned by AFM tapping mode using both untrimmed and trimmed probe tip. A comparison of the scanning results with analytical calculation showed that the trimmed tips were superior in imaging the profile for both the hole shaped and pin shaped microfeatures. But when using the trimmed high aspect ratio tip, the scanning speed was significantly low. Higher scanning speed usually resulted to tip breakage. The trimmed tips were expensive and justified for special applications.

Item Type: Article (Journal)
Additional Information: 4751/27098
Uncontrolled Keywords: High aspect ratio atomic force microscope tip; High resolution imaging; Surface characterisation
Subjects: T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User: Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited: 24 Jul 2013 09:47
Last Modified: 24 Jul 2013 09:47
URI: http://irep.iium.edu.my/id/eprint/27098

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